Partner for Advanced Nanopatterning

20th Workshop Beams & More
16.11.2023

IMS CHIPS
Stuttgart, Germany 

Welcome to our
20th Beams & More workshop!

We are very pleased to be returning to a real on-site workshop, as was the case in 2019 and before, and it is my sincere pleasure to cordially invite you.

This workshop is not only a series of interesting contributions from our collaborating partners on micro- and nanopatterning techniques. It also offers the best networking opportunities by bringing together experts and decision makers from start-ups, SMEs and large companies.

The participation fee of € 270 includes lunch and dinner. An online link will be made available to all registrants, so that the presentations can be followed in case attendance at the workshop is not possible. Please note that the online stream allows only a limited participation and that a trouble-free operation cannot be guaranteed.

Please register by using the „Registration“ button on this website.

I am looking forward to meeting you in person at the workshop.

Sincerely,
Julian Hartbaum

preliminary program

Carl Zeiss SMT GmbH
Oberkochen, Germany

High-NA EUV – the future that is already here

Irati Alonso Calafell

IMS Nanofabrication GmbH
Brunn am Gebirge, Austria

Tbd

Vistec Electron Beam GmbH
Jena, Germany
IMS CHIPS
Stuttgart, Germany

E-beam lithography optimization for high quality photonic waveguides

Uwe Zeitner

Fraunhofer IOF
Jena, Germany

The potential of e-beam lithography for micro- and nano-optics fabrication on large areas

CEA-Leti
Grenoble, France

Ebeam Direct Write Lithography: the versatile ally of optical lithography

Sven Bauerdick

GenISys GmbH,
Taufkirchen, Germany

SEM-based metrology for micro and nano patterns

Tbd

Dioptic GmbH
Weinheim, Germany

Tbd

P. Schuster/T. Achleitner

EV Group,
St. Florian am Inn, Austria

NIL for advanced packaging

SCIL Nanoimprint Solutions
Eindhoven, The Netherlands

Wafer based NIL for direct replication of inorganic functional optical materials

Tbd

micro resist technology GmbH,
Berlin, Germany

Tbd

IMS CHIPS
Stuttgart, Germany

Tbd

Victor Brasch

Q.ANT GmbH,
Stuttgart, Germany

E-beam lithography for integrated quantum optics with lithium niobate on insulator

Photonicsens
Valencia, Spain

Tbd

AIT Austrian Institute of Technology GmbH
Vienna, Austria

Nanoimprint lithography for the fabrication of multifunctional nanoparticles for biomedical applications

Registration