Beams & More

IMS CHIPS

Partner for
Advanced Nanopatterning

23^rd Workshop

November 26, 2026

Programm-Highlights

About the Workshop

A one-day forum featuring presentations from industry and research partners on micro- and nanostructuring – with excellent networking opportunities.

Welcome to the
Beams & More workshop!

Enjoy the inspiring atmosphere of this one-day event and take part in some mutually beneficial exchanges.

The participation fee of € 300 includes lunch and dinner. A link to the online stream will be made available to all registrants in case attendance at the workshop is not possible.

Please register using the “Registration” button on this website.

I look forward to meeting you in person at the workshop.

Sincerely,
Julian Hartbaum

Beams and More Workshop 2026

Preliminary Program

23rd Beams & More Workshop · November 26, 2026 · HLRS, Stuttgart, Germany

9:3000:05WelcomeNiels QuackIMS CHIPSStuttgart, Germany

9:3500:15Beams & More 2026Julian HartbaumIMS CHIPSStuttgart, Germany

9:5000:20ZEISS DUNE®: Closed-Loop, Per-Wafer Shape Control for Advanced Semiconductor ManufacturingOfir SharoniCarl Zeiss SMS Ltd.Bar Lev, Israel

10:1000:20Spatial thickness control in magnetron sputter deposition by pulse-width modulationBenny Böhmscia Systems GmbHChemnitz, Germany

10:3000:20Resist and Photopolymer Innovations for Advanced Technologies: Product portfolio Expansion as a Member of the TOK Group.Maik Gerngroßmicro resist technology GmbHBerlin, Germany

10:5000:30☕ Coffee break

11:2000:20Electron-beam writing strategies for curvilinear & 3D featuresMathias HädrichVistec Electron Beam GmbHJena, Germany

11:4000:20Aligned 3D microprinting for photonic integrationJochen ZimmerNanoscribe GmbH & Co. KGEggenstein-Leopoldshafen, Germany

12:0000:20Integrated Photonics UpdateKevin EdelmannIMS CHIPSStuttgart, Germany

12:2000:20Lithographic structuring as an enabling process for sophisticated optical productsWinfried AhrensIMT Masken und Teilungen AGGreifensee, Switzerland

12:4501:00♜ LunchIMS CHIPS lounge area

13:4500:30◆ IMS TourStart @ IMS lounge area

14:3000:20Increased throughput in thermal nanolithography via parallelization.Emine CaginHeidelberg Instruments Mikrotechnik GmbHHeidelberg, Germany

14:5000:20Laser patterning of silicon for SERS substrates and microfiltersHardik VaghasiyaSmartMembranes GmbHHalle (Saale), Germany

15:1000:20Micromachining of optical surface using silicon crystalline structureVictor MichaudFocuslight Switzerland SAHauterive, Switzerland

15:3000:20tbdSimon MuntwylerFemtoTools AGZurich, Switzerland

15:5000:30☕ Coffee break

16:2000:20Nanomechanical resonator optimizations for photothermal single-molecule spectroscopySilvan SchmidInvisible-Light Labs GmbHVienna, Austria

16:4000:20QFactory: Nanomechanics from Research to Real World ApplicationsDenise PugliaQfactoryCopenhagen, Denmark

17:0000:20tbdMichael MühlbergerProfaktor GmbHSteyr-Gleink, Austria

17:2000:20Nanoimprinted multifunctional nanoprobes for biomolecular detectionAstrit ShoshiIMS CHIPSStuttgart, Germany

17:4000:05Concluding remarksJulian HartbaumIMS CHIPSStuttgart, Germany

18:30✦ Joint DinnerWaldhotel Relexa · Stuttgart, Germany

Program subject to change.

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Be part of the exchange.

Join experts from industry and research and gain insights into the latest advances in nanostructuring.

✎ Registration →