Beams & More
IMS CHIPS
Partner for
Advanced Nanopatterning
23rd Workshop
Save the date
November 26, 2026
Programm-Highlights
- E-beam & Laser Patterning
- Photonic Processes & Devices
- EUV & Nanoimprint Lithography
- Micro-Optics & Micromechanics
About the Workshop
A one-day forum featuring presentations from industry and research partners on micro- and nanostructuring – with excellent networking opportunities.
Location
HLRS, Nobelstr. 19, 70569 Stuttgart, Germany
Participation
In-person event, including lunch and dinner