Beams & More
IMS CHIPS
Partner for
Advanced Nanopatterning
23rd Workshop
November 26, 2026
- E-beam & Laser Patterning
- Photonic Processes & Devices
- EUV & Nanoimprint Lithography
- Micro-Optics & Micromechanics
About the Workshop
A one-day forum featuring presentations from industry and research partners on micro- and nanostructuring – with excellent networking opportunities.
Welcome to the
Beams & More workshop!
Enjoy the inspiring atmosphere of this one-day event and take part in some mutually beneficial exchanges.
The participation fee of € 300 includes lunch and dinner. A link to the online stream will be made available to all registrants in case attendance at the workshop is not possible.
Please register using the “Registration” button on this website.
I look forward to meeting you in person at the workshop.
Sincerely,
Julian Hartbaum
Preliminary Program
Spatial thickness control in magnetron sputter deposition by pulse-width modulation
Speaker Benny Böhm
Company scia systems
Location Chemnitz, Germany
Nanomechanical resonator optimizations for photothermal single-molecule spectroscopy
Speaker Silvan Schmid
Company Invisible-Light Labs GmbH
Location Vienna, Austria
Lithographic structuring as an enabling process for sophisticated optical products
Speaker Winfried Ahrens
Company IMT Masken und Teilungen AG
Location Greifensee, Switzerland
TBD
Speaker Simon Muntwyler
Company Oxford Instruments
Location Zurich, Switzerland
TBD
Speaker Victor Michaud
Company Focuslight Switzerland SA
Location Hauterive, Switzerland
TBD
Speaker TBD
Company Vistec Electron Beam GmbH
Location Jena, Germany
TBD
Speaker TBD
Company micro resist technology GmbH
Location Berlin, Germany
Increased throughput in thermal nanolithography via parallelization.
Speaker Emine Cagin
Company Heidelberg Instruments Mikrotechnik GmbH
Location Heidelberg, Germany
Be part of the exchange.
Join experts from industry and research and gain insights into the latest advances in nanostructuring.